Vertical Lift Stages

• Compact construction

• Outstanding rigidity

• Noncontact direct drive

• 2 nm resolution; 60 picometers
   with Automation 3200

• High repeatability

• Outstanding in-position stability

• No maintenance

• Compact construction

• Outstanding rigidity

• High repeatability

• Outstanding in-position stability

• Easily configurable with the
   ALS130 and other stages

• 9 nm linear resolution

• 0.25 nm resolution with
   Automation 3200

• Turnkey drive and control
   electronics

• Noncontact, non-cogging,
   direct-drive (patent pending)