• Large clear aperture
• Travel range from 100 mm x 100 mm to 400 mm x 400 mm
• High performance linear motion guides
• 15 arc sec orthogonality
• Noncontact linear encoder for high accuracy
• Compact construction
• Outstanding rigidity
• Noncontact direct drive
• 2 nm resolution; 60 picometers with Automation 3200
• High repeatability
• Outstanding in-position stability
• No maintenance
• Low profile and small footprint
• Ultra-fine resolution
• Integral motor
• Optional aperture versions
• Manual adjust knob with graduated tabletop
• Available with vacuum preparation